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发明名称
SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS
摘要
申请公布号
US5078824(A)
申请公布日期
1992.01.07
申请号
US19900492139
申请日期
1990.03.13
申请人
FUJITSU LIMITED
发明人
FUJIMURA, SHUZO
分类号
H01L21/302;G03F7/20;H01L21/00;H01L21/02;H01L21/30;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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