| 摘要 |
PURPOSE:To obtain a slit structure electrostrictive effect element which does not contain a crack therein and in which a large displacement can be output by a low voltage by superposing a green sheet made of a material exhibiting an electrostrictive effect, a green sheet printed with an inner electrode, and a green sheet in which a material scattered by heating is printed in predetermined order, and then thermally press-bonding them. CONSTITUTION:Organic binder is added to a material exhibiting an electrostrictive effect of lead titanate-zirconate, kneaded to a slurry, and a green sheet 8 is manufactured by the slurry. Inner electrode pastes 9a, 9b containing silver-palladium alloy as main ingredients are screen printed on the sheet. Similarly, cavity forming paste 14 containing graphite as a main ingredient is printed. Further, in order to cut after baking, paste containing silver-palladium alloy as main ingredients is printed as cutting wire 11 to be disposed on an uppermost layer. After predetermined number of the sheets are superposed in a predetermined order, they are disposed between upper and lower molds, and pressed. After the obtained pressed body is preliminarily baked, it is baked at 1100 deg.C to obtain a laminated sintered ceramics in which cavities are formed thereon. A voltage applying terminal is seized to the side of an element obtained by cutting it at a predetermined position, leads are connected thereto to obtain an electrostrictive effect element. |
