CHARGE PARTICLE BEAM WORKING MACHINE,申请号JP19900102720-传众专利搜索

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发明名称	CHARGE PARTICLE BEAM WORKING MACHINE
摘要
申请公布号	JPH03297585(A)	申请公布日期	1991.12.27
申请号	JP19900102720	申请日期	1990.04.18
申请人	MITSUBISHI ELECTRIC CORP	发明人	KANEKO HIDEMI
分类号	B23K15/06	主分类号	B23K15/06
代理机构		代理人
主权项
地址

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