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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03292726(A)
申请公布日期
1991.12.24
申请号
JP19900095303
申请日期
1990.04.10
申请人
MITSUBISHI ELECTRIC CORP
发明人
NAKANO YUTAKA
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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