| 摘要 |
PURPOSE:To broadly improve recognizing accuracy by excepting an area observed unclearly and executing the operation of matching only on the area observed clearly. CONSTITUTION:An area in which a reference pattern is not clear is detected with observing a sample 12 by an optical means 10, next, a check pattern is detected with observing a checking object by the same optical means 10, and when the reference pattern and the check pattern are collated, they are collated with excepting the nuclear area. Thus, since the unclear area is excepted and the collation of the pattern on the area observed clearly is executed, recognizing accuracy can be improved. |
