| 摘要 |
PURPOSE:To reduce processing capacity of a gas purifier, and to reduce size and cost by individually providing blowing means for blowing moistened toxic gas from a laser generator to the purifier, and cooling means for cooling the generator. CONSTITUTION:Means for cooling an excimer laser generator 11 is composed of a circulation fan 13 and a heat exchanger 14, a base 18 raised at its temperature by generated heat 17 of the laser generator 11 is circulated by a circulation fan 13, cooled by a heat exchanger 14 mounted on the way of its passage to remove the heat 17. Thus, the air flow rate of the fan 15 is not necessary to obtain the flow rate for cooling the generator 11, but may be the rate matching to the leakage of toxic gas 10. Accordingly, by considering that the leakage of the toxic gas 16 is small, since the flow rate can be reduced, the flow rate of the gas to be processed by a gas purifier 20 can be reduced, and the purifier 20 can be reduce in size. |
