| 摘要 |
PURPOSE:To enable preventive maintenance as well as prevention of a laser oscillator interruption during operation by providing a plurality of comparing means for managing conductivity of electrode cooling water and specifying exchange hours of ion exchange resin by the output display. CONSTITUTION:Conductivity of electrode cooling water 7 detected by a detecting means 13 is amplified by an amplifier 14 and transmitted to a first comparing means 20 and a second comparing means 21. The comparing means 20, 21 set suspension of a power source 8 with a first reference value and set an alarm on a display means 22 with a second reference value. As the number of working days of laser increases, conductivity of the electrode cooling water 7 increases so that the comparing means 21 for setting the alarm first operates to transmit an alarm signal to the display means 22 to have the display means 22 lit. If ion exchange resin is not replaced and laser continues to operate in this state, the conductivity becomes approximately 1mucm in a few days, the output signal is transmitted to the high frequency high voltage power source 8, and voltage application to a laser oscillator electrode is cut off. |
