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发明名称
摘要
申请公布号
CH679075(A5)
申请公布日期
1991.12.13
申请号
CH19890001428
申请日期
1989.04.14
申请人
TECHNISCHE UNIVERSITAET KARL-MARX-STADT
发明人
SAGITOW, RINAT GARIFOWITSCH;SELESNJEW, VLADIMIR NIKOLAJEWITSCH;POPOW, JURI MICHAILOWITSCH;SCHARFF, WOLFRAM;MORAWSKI, DIETRICH;SCHMIDT, ARMIN;LOESCHKE, KLAUS
分类号
G01J3/28;H01L31/09
主分类号
G01J3/28
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代理人
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