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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH03276754(A)
申请公布日期
1991.12.06
申请号
JP19900077992
申请日期
1990.03.27
申请人
KAWASAKI STEEL CORP
发明人
KIMURA KIKUO;SAKAMOTO MAKOTO
分类号
H01L21/822;H01L21/82;H01L27/04
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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