PLASMA CVD DEVICE,申请号JP19900063399-传众专利搜索

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发明名称	PLASMA CVD DEVICE
摘要
申请公布号	JPH03264675(A)	申请公布日期	1991.11.25
申请号	JP19900063399	申请日期	1990.03.14
申请人	HITACHI LTD	发明人	KAZUMI HIDEYUKI;TETSUKA TSUTOMU
分类号	C23C16/50;C23C16/511;H01L21/205;H01L21/31	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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