METHOD OF PRODUCING HETERO STRUCTURE,申请号US19890438290-传众专利搜索

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发明名称	METHOD OF PRODUCING HETERO STRUCTURE
摘要
申请公布号	US5066355(A)	申请公布日期	1991.11.19
申请号	US19890438290	申请日期	1989.11.16
申请人	AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY	发明人	MIYAO, MASANOBU;NAKAGAWA, KIYOKAZU;OHYU, KIYONORI;MURAKAMI, EIICHI;OHSHIMA, TAKASHI
分类号	H01L21/20;H01L21/203;H01L21/28;H01L21/285	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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