| 摘要 |
<p>An angle measuring interferometer comprises a source (10) which emits a light beam (12) containing two orthogonally polarized components of different frequencies; a source of a stabilized electrical reference signal (11) of a frequency corresponding to the frequency difference between the two components of the light beam; a tilted shear plate (16) and a half-wave plate (29A) for converting said beam into two parallel beams (30,33) with the same polarization; means including a polarizing beamsplitter (40), for causing each of the beams (30,33) to be reflected once by each of two plane mirrors (71,70) to produce two parallel output beams (60, 63) with the same polarization; means including a half-wave plate (29B) and the tilted shear plate (16) for converting said two output beams into a single output beam (80) in which the phase difference between the two components is proportional to the angle ( theta ) between the two mirrors (70, 71); a photoelectric detector (83) to produce the measurement signal (85); and a phase/meter accumulator (90) to indicate the phase difference between the reference and measurement signals (11, 85) which is proportional to the changes in the angular orientation between said two mirrors.</p> |
