ION IMPLATING DEVICE AND ITS CONTROL METHOD,申请号JP19900047966-传众专利搜索

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发明名称	ION IMPLATING DEVICE AND ITS CONTROL METHOD
摘要
申请公布号	JPH03252039(A)	申请公布日期	1991.11.11
申请号	JP19900047966	申请日期	1990.02.28
申请人	FUJITSU LTD	发明人	IGARASHI TAKASHI;MORI HARUHISA
分类号	H01J37/30;H01J37/317;H01L21/265	主分类号	H01J37/30
代理机构		代理人
主权项
地址

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