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发明名称
HEAT TREATING FURNACE FOR MANUFACTURING SEMICONDUCTOR DEVICE AND CANTILEVER
摘要
申请公布号
JPH03250625(A)
申请公布日期
1991.11.08
申请号
JP19900049014
申请日期
1990.02.27
申请人
MITSUBISHI MATERIALS CORP
发明人
ABE HIDENOBU;YOKOO NOBUO;SHIBAZAKI HIDEAKI;SHIOTA TAKAAKI;SHINGYOUCHI TAKAYUKI
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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