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发明名称
FORMATION OF HARD FILM
摘要
申请公布号
JPH03249169(A)
申请公布日期
1991.11.07
申请号
JP19900046642
申请日期
1990.02.27
申请人
TOSHIBA CORP
发明人
IZUHARA MASAMI
分类号
C23C14/06;C23C14/24
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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