| 摘要 |
PURPOSE:To realize a large current of ion beams at less than 100eV by applying a high-frequency voltage to quadrupole electrodes which have a specific waving pitch, and at the same time, leading in the ion beams in a specific direction. CONSTITUTION:A specific ion passing through a mass spectrograph 4 is decelerated by high-frequency quadrupole electrodes 1b and 1b' (1a and 1a'). The quadrupole electrodes are formed in a waving pitch making in a rough pitch at the incident side of beam along the axial direction, and in a minute pitch at the output side. The beams flow in the axial direction of the quadrupole electrodes. As a result, the beams are decelerated reversely to the acceleration, and radiated by maintaining the potential of a sample 8 at the earthing potential. The ion beams are injected when the high-frequency power of the quadrupole electrodes is in a specific phase scope. The energy of the decelerated beams can be regulated freely by converting the frequency of the high-frequency voltage applied to the quadrupole electrodes. |
