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发明名称
PATTERN FORMATION
摘要
申请公布号
JPH03245528(A)
申请公布日期
1991.11.01
申请号
JP19900041180
申请日期
1990.02.23
申请人
CANON INC
发明人
KANEKO TETSUYA;TAKEDA TOSHIHIKO;MISHINA SHINYA;SAKANO YOSHIKAZU;NOMURA ICHIRO;ONO HARUTO
分类号
H01L21/302;H01L21/3065;H01L21/3205
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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