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发明名称
COMPOUND SEMICONDUCTOR SUBSTRATE, AND MANUFACTURE THEREOF
摘要
申请公布号
JPH03234019(A)
申请公布日期
1991.10.18
申请号
JP19900029910
申请日期
1990.02.09
申请人
OKI ELECTRIC IND CO LTD
发明人
AKIYAMA MASAHIRO;YAMAICHI EIJI;UEDA TAKASHI;ONOZAWA SACHIKO
分类号
H01L21/205;H01L21/20
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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