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发明名称
HALBLEITEREINRICHTUNG UND VERFAHREN ZU DEREN HERSTELLUNG
摘要
申请公布号
DE4110645(A1)
申请公布日期
1991.10.17
申请号
DE19914110645
申请日期
1991.04.02
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
OGOH, IKUO, ITAMI, HYOGO, JP
分类号
H01L21/336;H01L21/8238;H01L27/092
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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