| 摘要 |
An oil filtration and exhaust apparatus for filtering particulates and gases from the recirculating oil of a vacuum pump which is adapted to remove gases from a process enclosure. The oil filtration and exhaust apparatus removes particulates and gases from the recirculating oil by means of particulate filters and a gas scrubbing filter. Additionally, the exhaust gases are demisted prior to exhaust to an exhaust header. The apparatus is particularly suited to semiconductor manufacturing processes.
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