HEAT TREATMENT OF III-V COMPOUND SEMICONDUCTOR SINGLE CRYSTAL,申请号JP19900019789-传众专利搜索

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发明名称	HEAT TREATMENT OF III-V COMPOUND SEMICONDUCTOR SINGLE CRYSTAL
摘要
申请公布号	JPH03222428(A)	申请公布日期	1991.10.01
申请号	JP19900019789	申请日期	1990.01.29
申请人	NEC CORP	发明人	MATSUMURA TAKAO
分类号	H01L21/324;H01L21/26	主分类号	H01L21/324
代理机构		代理人
主权项
地址

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