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发明名称
INTERFEROMETER
摘要
申请公布号
JPH03220431(A)
申请公布日期
1991.09.27
申请号
JP19900016886
申请日期
1990.01.25
申请人
JEOL LTD
发明人
NISHISAKA HISAKAZU
分类号
G01J3/45
主分类号
G01J3/45
代理机构
代理人
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