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发明名称
ETCHING DEVICE FOR SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH03214731(A)
申请公布日期
1991.09.19
申请号
JP19900009704
申请日期
1990.01.19
申请人
NEC CORP
发明人
OGURA SHOICHI
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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