发明名称 |
Superlattice field effect transistor with monolayer confinement |
摘要 |
A heterojunction field effect transistor (HFET) having a source, drain, and channel, wherein the channel is a top layer of a superlattice buffer, eliminating the need for a thick buffer layer. The superlattice buffer comprises alternating barrier and quantum well layers which are thin enough to provide wide separation in energy bands within the quantum wells. In a preferred embodiment the channel comprises a quantum well and one to five monolayers having a different bandgap than the channel region and serves to modify electron wave function and conduction band energy in the channel region. Preferably, a ten period AlAs/GaAs superlattice is formed underneath the channel.
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申请公布号 |
US5049951(A) |
申请公布日期 |
1991.09.17 |
申请号 |
US19900630613 |
申请日期 |
1990.12.20 |
申请人 |
MOTOROLA, INC. |
发明人 |
GORONKIN, HERBERT;TEHRANI, SAIED N.;ZHU, X. THEODORE |
分类号 |
H01L21/203;H01L21/338;H01L29/10;H01L29/12;H01L29/15;H01L29/205;H01L29/778;H01L29/812 |
主分类号 |
H01L21/203 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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