发明名称 Superlattice field effect transistor with monolayer confinement
摘要 A heterojunction field effect transistor (HFET) having a source, drain, and channel, wherein the channel is a top layer of a superlattice buffer, eliminating the need for a thick buffer layer. The superlattice buffer comprises alternating barrier and quantum well layers which are thin enough to provide wide separation in energy bands within the quantum wells. In a preferred embodiment the channel comprises a quantum well and one to five monolayers having a different bandgap than the channel region and serves to modify electron wave function and conduction band energy in the channel region. Preferably, a ten period AlAs/GaAs superlattice is formed underneath the channel.
申请公布号 US5049951(A) 申请公布日期 1991.09.17
申请号 US19900630613 申请日期 1990.12.20
申请人 MOTOROLA, INC. 发明人 GORONKIN, HERBERT;TEHRANI, SAIED N.;ZHU, X. THEODORE
分类号 H01L21/203;H01L21/338;H01L29/10;H01L29/12;H01L29/15;H01L29/205;H01L29/778;H01L29/812 主分类号 H01L21/203
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