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发明名称
PLASMA ETCHING DEVICE
摘要
申请公布号
JPH03207873(A)
申请公布日期
1991.09.11
申请号
JP19900002803
申请日期
1990.01.09
申请人
MITSUBISHI ELECTRIC CORP
发明人
NAKAMOTO KAZUO
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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