SINGLE CRYSTAL PRODUCTION APPARATUS

摘要

A single crystal production apparatus equipped with a raw material feeder (20) capable of supplying continuously massive raw material while controlling highly accurately the supply quantity. The raw material feeder (20) is equipped with a storage cylinder (22) storing raw material, a measuring cylinder (24) for receiving the raw material from the storage cylinder and supplying it to a crucible (2) and a load meter (26) for measuring the supply quantity of the raw material inside the measuring cylinder to the crucible. The apparatus of the invention can grow silicon single crystal while supplying continuously silicon massive raw material, which is used widely for the growth of single crystal, into the crucible.