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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03200330(A)
申请公布日期
1991.09.02
申请号
JP19890341208
申请日期
1989.12.27
申请人
SANYO ELECTRIC CO LTD
发明人
KANDA KOJI
分类号
H01L21/3205;H01L21/768;H01L23/52
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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