| 摘要 |
PURPOSE:To suppress the peak level in the primary resonance frequency of a piezoelectric element by providing a control means for braking the vibration of the piezoelectric element. CONSTITUTION:On a substrate 1 composed of ceramic, a base composed of the ceramic is fixed, a copper layer 3 is disposed on the upper surface of the base 2, further the piezoelectric element 4 is fixed thereon in a form of a cantilever. As the piezoelectric element 4, a brass thin plate 5 is held by ceramic plates 6, 7 and a bimolph plate, what is called obtained by forming silver thin film layers 8, 9 on the surfaces of the ceramic plates 6, 7 is used. The silver thin film layer 9 for making the piezoelectric element 4 abut against the base 2 is fixed to the base 2 by bonding through a conductive bonding agent 10 to electrically connect the silver thin film layer 9 to the copper layer 3. The silver thin film layer 8 which does not abut to the base 2 and the copper layer 3 are electrically connected with their ends soldered respectively through a lead wire 11. Further, by filling gelling silicon resin 20 as the braking material for braking the vibration of the piezoelectric element 4 between the piezoelectric element 4 and the substrate 1, the peak level in the primary resonance frequency fOSE can be lowered, as shown by the solid line Z. |
