| 摘要 |
<p>PURPOSE:To allow the tight adhesion of an electrode terminal to a substrate with a good adhesive property by nearly completely removing the residual film of a filter base material remaining on the side edge part of a substrate at the time of formation of color filters. CONSTITUTION:After a protective insulating film is formed on the color filters, the residual film 3a of the filter base material remaining on the side edge part of the substrate 1 is removed by plasma ashing after the modification treatment to change the properties thereof is executed in the patterning process of the filter base material. The residual filter 3a of the filter base material remaining on the side edge part of the substrate 1 at the time of the formation of the color filters 3 can be nearly completely eliminated and, therefore, the electrode terminal 5a formed thereafter is tightly adhered with the good adhesive property to the substrate 1.</p> |
