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发明名称
TUBE FOR DIFFUSION FURNACE
摘要
申请公布号
JPH03200325(A)
申请公布日期
1991.09.02
申请号
JP19890343734
申请日期
1989.12.27
申请人
ROHM CO LTD
发明人
NISHIMORI HIROTOMO;KAWAI NAOHISA
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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