Tomographic measuring device - measures three=dimensional micro-magnetic or microelectronic fields with rotating device

摘要

Tomographic measuring unit in which an electron beam is directed into the field of the object being measured, and is detected by a read out means. The object is arranged on the rotating plate (12) of a rotating device (11) and rotates about an axis (13) perpendicular to the beam. The rotating device (11) comprises three position members (20 to 22) with piezoelectric adjustable axial lengths (L) which contact the plate (12) via connection elements (23 to 25) with ball joints (26 to 28) arranged in a circle (K2) of relatively small radius. USE/ADVANTAGE - For measurement of three dimensional micro magnetic or microelectronic fields. Simple construction. Enables accurate measurement.