发明名称 |
Method for measuring the flow rate of exhaust gas |
摘要 |
In a method of measuring the flow rate of an exhaust gas, an external atmosphere is caused to flow into a pipe which branches off from the main pipe to open at the other end onto the external atmosphere. The flow rate of the atmosphere in the branched-pipe is measured, and the flow rate of the exhaust gas in the main pipe corresponding to the measured value is determined based on a calibration curve.
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申请公布号 |
US5038608(A) |
申请公布日期 |
1991.08.13 |
申请号 |
US19900468361 |
申请日期 |
1990.01.22 |
申请人 |
TOKYO ELECTRON LIMITED;TEL KYUSHU LIMITED;KABUSHIKI KAISHA TOSHIBA |
发明人 |
SAKAI, HIROYUKI;SHIRAKAWA, EIICHI;MATSUMURA, KIMIHARU |
分类号 |
G01F5/00 |
主分类号 |
G01F5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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