发明名称 Method for measuring the flow rate of exhaust gas
摘要 In a method of measuring the flow rate of an exhaust gas, an external atmosphere is caused to flow into a pipe which branches off from the main pipe to open at the other end onto the external atmosphere. The flow rate of the atmosphere in the branched-pipe is measured, and the flow rate of the exhaust gas in the main pipe corresponding to the measured value is determined based on a calibration curve.
申请公布号 US5038608(A) 申请公布日期 1991.08.13
申请号 US19900468361 申请日期 1990.01.22
申请人 TOKYO ELECTRON LIMITED;TEL KYUSHU LIMITED;KABUSHIKI KAISHA TOSHIBA 发明人 SAKAI, HIROYUKI;SHIRAKAWA, EIICHI;MATSUMURA, KIMIHARU
分类号 G01F5/00 主分类号 G01F5/00
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