| 摘要 |
PURPOSE: To obtain a method by which contaminant particles having small sizes of <=0.1μm can be removed relatively easily from a flat surface or a surface, having recessed sections or grooves by covering the designated surface of an article with a cleaning solution in a pressure vessel chamber and introducing a gas to the chamber with a first prescribed pressure, so that the gas can dissolve in the cleaning solution, and then reducing the pressure in the chamber to a second pressure which is lower than the first pressure. CONSTITUTION: After the designated surface of an article 21 is at least partially covered with a cleaning solution 25 in a pressure vessel chamber 23, a gas 29 is introduced to the chamber 23 with a first prescribed pressure, so that at least part of the gas 29 can dissolve in the solution 25. Then the pressure in the chamber 23 is reduced to a second pressure which is lower than the first pressure, so that bubbles produced in the solution 25 can separate the contaminant particles from the designated surface of the article 21. For example, the cleaning solution 25 composed of demineralized filtrated water, etc., is introduced into a pressure vessel 23 in which the article 21 is set through a valve 27 until the article 21 is submerged in the solution 25. Then the gas 29 which dissolves in the solution 25 is introduced into the vessel by opening a pressure valve 31, until the gas pressure in the vessel 23 reaches a prescribed value p1 . When the gas pressure reaches the value p1 , the gas pressure is quickly lowered to a second pressure p2 which is markedly lower than the first pressure p1 , by abruptly opening a pressure-relief valve 33.
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