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发明名称
METHOD OF DETERMINING ELECTRICALLY ACTIVE DOPANTS IN SEMICONDUCTOR JUNCTION STRUCTURES
摘要
申请公布号
SU1669407(A3)
申请公布日期
1991.08.07
申请号
SU19874203877
申请日期
1987.11.16
申请人
MADYAR TUDOMANOSH AKADEMIA MYUSAKI FIZ KUTATO INTEZET (INOPREDPRIYATIE);DR.VOLFGANG YANCH (FIRMA)
发明人
VOLFGANT YANCH,AT;DERD FERENTSI,HU
分类号
G01N25/00;G01N22/00;H01L21/66
主分类号
G01N25/00
代理机构
代理人
主权项
地址
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