| 摘要 |
<p>RF power sources (12,13) supply voltage to the segments (1a,1b) which constitute a discharge tube. Partitioning walls (B) arranged between the neighbouring discharge tube segments are composed of an electrically conductive material, and are maintained at a constant potential. With the potential of the partitioning walls (B) being maintained constant, it is allowed to eliminate current through stray capacitance present between the discharge tube segments (1a) and (1b), and variation in the laser output can be decreased.</p> |
