发明名称 Method of manufacturing semiconductor having group II-group VI compounds doped with nitrogen
摘要 A method of making a semiconductor comprises depositing a group II-group VI compound onto a substrate in the presence of nitrogen using sputtering to produce a nitrogen-doped semiconductor. This method can be used for making a photovoltaic cell using sputtering to apply a back contact layer of group II-group VI compound to a substrate in the presence of nitrogen, the back coating layer being doped with nitrogen. A semiconductor comprising a group II-group VI compound doped with nitrogen, and a photovoltaic cell comprising a substrate on which is deposited a layer of a group II-group VI compound doped with nitrogen, are also included.
申请公布号 US6852614(B1) 申请公布日期 2005.02.08
申请号 US20010815958 申请日期 2001.03.23
申请人 UNIVERSITY OF MAINE 发明人 COMPAAN ALVIN D.;PRICE KENT J.;MA XIANDA;MAKHRATCHEV KONSTANTIN
分类号 H01L21/28;H01L21/363;H01L31/18;(IPC1-7):H01L21/28 主分类号 H01L21/28
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