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发明名称
ELECTRON BEAM APPARATUS
摘要
申请公布号
JPH03179655(A)
申请公布日期
1991.08.05
申请号
JP19890319287
申请日期
1989.12.08
申请人
FUJITSU LTD
发明人
NAKAZAWA KAZUHIRO;ITO AKIO
分类号
H01L21/66;H01J37/244;H01J37/26
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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