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发明名称
VERFAHREN ZUR HERSTELLUNG VON OEFFNUNGEN MIT SEITENWAENDEN MIT KONTROLLIERTER KONTUR MITTELS EINES CHEMISCHEN AETZVERFAHRENS.
摘要
申请公布号
DE3679933(D1)
申请公布日期
1991.08.01
申请号
DE19863679933
申请日期
1986.04.30
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
CHEN, LEE;MATHAD, GANGADHARA SWAMI, POUGHKEEPSIE NEW YORK 12603, US
分类号
H01L21/302;H01L21/3065;H01L21/311;(IPC1-7):H01L21/31;H01L21/60
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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