| 发明名称 |
DUST-PREVENTING FILM. |
| 摘要 |
<p>A dust-preventing film comprising a pellicle frame (2), a pellicle film (1) spread across one end surface thereof, and an adhesive layer (5) that includes a hot melt-type adhesive (4) provided on the other end surfaces. The film is attached to a photo-mask (6) or a reticule to prevent foreign matters from adhering to the circuit patterns (7). <IMAGE></p> |
| 申请公布号 |
EP0438602(A1) |
申请公布日期 |
1991.07.31 |
| 申请号 |
EP19900912053 |
申请日期 |
1990.08.09 |
| 申请人 |
DAICEL CHEMICAL INDUSTRIES, LTD. |
发明人 |
MIYATA AKIHIRO 940, SHINZAIKE;TAKAHASHI SHIGEYUKI |
| 分类号 |
G03F1/62;H01L21/027;H01L21/30 |
主分类号 |
G03F1/62 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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