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发明名称
SPUTTERING DEVICE, METHOD AND DEVICE FOR EXCHANGING TARGET
摘要
申请公布号
JPH03170671(A)
申请公布日期
1991.07.24
申请号
JP19890307719
申请日期
1989.11.29
申请人
HITACHI LTD
发明人
KAMEI MITSUHIRO;SETOYAMA HIDETSUGU
分类号
C23C14/34;C23C14/56
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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Elektrische Steckverbindung
