| 摘要 |
PURPOSE:To make it possible to obtain a stabilized optical high output from a laser oscillation device by controlling an injection amount of laser gas according to a discharge state to be detected. CONSTITUTION:An attempt is made to provide high voltage between electrodes 5 and 6 of a laser oscillation device 1 which face each other and discharge, and detect an internal voltage of the device 1 with a voltage detection means 13, fix the voltage, and detect a discharge state in the device 1 with a discharge state detection means 11. A control means 25 is adapted to control the amount of gas injection injected from a gas injection means 15 into the device 1 according to the discharge state. This construction makes it possible to provide a high optical output from the laser oscillation device 1 and minimize the amount of laser gas newly injected at the same time when a low optical output is required. |
