| 摘要 |
PURPOSE:To correct the detected signal intensities of the points on the surface of an unknown sample by arranging a known sample of the same component density to plural points to determine the sample surface close to the unknown sample, sampling the signal intensities from the known sample, and finding the detected signal intensity ratio of the points on the unknown sample from the resultant coordinates and the detected signal intensities. CONSTITUTION:In an electron beam microanalyzer 1, electron beams focused slender are radiated on the surface of a sample, X-ray signals are obtained from the sample surface, and the signals are sampled by a mapping device 2 while converting the position of the sample. The sampling data from the device 2 are fed to a data process device 3 and stored in a memory device 4, and a mapping image is displayed in a display device 5. Prior to the mapping, the X-ray signal intensities of a known sample 8 are sampled by the electron beam microanalyzer 1, and stored 4 together with three- point coordinates of the known sample 8. Then the X-ray signal intensities at the points of the surface of an unknown sample 7 are measured and stored 4, the intensities are divided by the X-ray signal intensity ratio of the coordinates position, and a corrected mapping image can be obtained. |
