Roll coating apparatus and method capable of providing coatings without pin holes

摘要

An improved roll coating apparatus and method includes a coating roll having a smooth surface for applying a resist, a doctor roll having grooves on its surface for supplying prescribed amount of the resist to the coating roll, and a back up roll which is in contact with the coating roll for conveying a substrate on which the resist is applied to a prescribed direction. Even if there are minute concave portions on the surface of the substrate, the resist is forced to fill the minute concave portions, since the resist is pressed and forced to be applied on the substrate by the coating roll having smooth surface and the back up roll.