摘要 |
In the uniform distribution of a significant impurity throughout a rod of semi-conductor material by zone melting, a molten zone is passed through the rod while containing the significant impurity within a bore of substantial <PICT:0932661/III/1> length within the rod so as to close the opening by melting before the molten zone reaches the significant impurity. Germanium is specified as semiconductor material. As shown, a molten zone 13 formed by an induction heating coil 12 is passed downwards through a rod 11 containing a significant impurity 15 in a bore 14. According to Fig. 1 (not shown) the opening is contained in a lateral or end face of the rod and the rod is zone melted in a crucible. |