| 摘要 |
<p>PURPOSE:To enable the control of wafers piece by piece by determining which kind of wafers in which process to be inputted into a processor from a storage shelf, and discriminating the processed wafers, thus controlling the flow of the wafers. CONSTITUTION:Wafers 70 placed on a carrier shelf 5 from an input-output device and sent along a rail 1 by a carrier 2 are transferred once onto a storage shelf 30 by the descent of an elevating head 4 by an elevating device 3 and the action of a transfer robot 21. The wafers 70 are then sent into a processor 60 by the transfer robot 21 through a loader 61, and after processing, taken out of an unloader 62 to be sent into a discriminating device 40, where the name of the kind and the wafer numbers are read, then stored temporarily in the storage shelf 30. Upon the arrival of the carrier 2, the wafers 70 are transferred from the storage shelf 30 to the carrier shelf 5 according to discrimination, and sent to a following process. The wafers can be thus controlled piece by piece to enable simultaneous production of multiple kinds.</p> |
