| 摘要 |
<p>PURPOSE:To simply and easily add an ID code even when a projecting exposure is repeatedly conducted by using a reticle and a stepper by selectively covering the code with an ID code.mask corresponding to the movement of the stepper. CONSTITUTION:An ID code.mask 6 can be arbitrarily moved in X and Y directions upon movement of a reticle 1, is finely moved separately from the movement of the reticle 1 with respect to the X direction, i.e., the arranging direction of bars for forming an ID code 5 to cover predetermined bars. The number of bard for passing the light is suitably selected to display row and column where a chip exists. Thus, even when a projecting exposure is repeatedly conducted by using the reticle 1 and a stepper, the code 5 can simply and easily be added.</p> |
