EINRICHTUNG FUER DIE ERZEUGUNG EINES PLASMAS,申请号DE19893942964-传众专利搜索

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发明名称	EINRICHTUNG FUER DIE ERZEUGUNG EINES PLASMAS
摘要
申请公布号	DE3942964(A1)	申请公布日期	1991.06.27
申请号	DE19893942964	申请日期	1989.12.23
申请人	LEYBOLD AG, 6450 HANAU, DE	发明人	GESCHE, ROLAND, DR., 6453 SELIGENSTADT, DE;KRETSCHMER, KARL-HEINZ, DR., 6070 LANGEN, DE
分类号	H05H1/46;C23C14/40;H01J37/08;H01J37/32;H01P1/18	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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