| 摘要 |
Device for continuously cleaning the exhaust gases of a vacuum installation by means of gas permeation diaphragms. The installation and operating costs are kept low for a good separation performance by forcing the flow of exhaust gas by means of the vacuum pump of the vacuum installation through a gas permeation diaphragm module and connecting the permeate side of the diaphragm module to the intake side of the same vacuum pump. |
