| 摘要 |
<p>PURPOSE:To enable an array of a projecting part for identification to be set arbitrarily and easily by allowing one or several projecting parts for identification to be removed for achieving an arbitrary array. CONSTITUTION:In a wafer carrier 1 with an array of one or several projecting parts 3 for identification, the projecting part 3 of the above wafer carrier can be removed and set in an arbitrary array. For example, a coupling means 2a is provided at a projecting part detecting position of the wafer carrier 1 by the maximum number of projections to be arrayed. Then, when one or several projections 3 for identification with a coupling means 2b are fixed at an arbitrary array position by the coupling means 2a at the side of the wafer carrier 1 and the coupling means 2b at the side of the projection for identification 3, an array for the projection for identification 3 can be provided at the projection part detection position of the wafer carrier 1. In that case, the coupling state between the coupling means 2a and the coupling means 2b is adjusted previously, thus achieving free mounting and removal of the projection for identification 3 onto the wafer carrier 1.</p> |
