FORMATION OF HARD CARBON FILM,申请号JP19890285600-传众专利搜索

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发明名称	FORMATION OF HARD CARBON FILM
摘要
申请公布号	JPH03146666(A)	申请公布日期	1991.06.21
申请号	JP19890285600	申请日期	1989.10.31
申请人	SHIMADZU CORP	发明人	OKADA SHIGENOBU
分类号	C23C16/22;C23C16/26;C23C16/27;C23C16/34;C23C16/50;C23C16/511	主分类号	C23C16/22
代理机构		代理人
主权项
地址

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